Introduction
The GMW-25 Plasma Generator is a rugged, highly reliable RF power source for plasma etching, CVD, and sputtering applications. Featuring precise power control and digital interfacing and increased load-powercapability, the GMW-25 generator provides the exceptional reliability and repeatability required for today's demanding plasma processes.
Operating at a customer-specified frequency in the range of 1.8 MHz to2.17 MHz, the GMW-25 generator produces 2500 W of power into a50Ω load. The DSP-based control module automatically measures forward RF power and reflected RF power, maintaining constant power output within ±1% of the set point over a Dynamic Power Range of 25 to2500 watts.
Precise power calibration is traceable to NIST (National Institute of Standards and Technology) through the ENI Power Standard. Low harmonic distortion and spurious-free performance complement theunit's RF power output control and unconditional RF stability.
An extremely rugged and highly efficient RF power section ensures greater power delivery into fixed match systems. The DSP-basedcontrol constantly monitors internal subsystem status to maximize system availability. Extensive built-in diagnostics and internal fail-safememory simplify maintenance requirements and increase system uptime.
A new 9-pin digital interface provides remote control, monitoring, and diagnostic capability via the RS-232 serial link to a computer or host terminal. Optional custom interface cards are also available.
GMW-25 Operation
Two modes of operation (basic and advanced) have been designed into the GMW-25 generator to accommodate various plasma applications. Some require just a fixed frequency and a set number of watts, while others require fine-tuned frequencies and other parameters.
Basic operation is intended for applications of RF power and a set number of watts at a fixed frequency.
Advanced operation allows custom configuration of various parameters for variable and sensitive frequency processes.
Basic Operation
The GMW-25 generator is designed to be used with minimal input from the user.
Generator Operation through the Front Panel
Turning on AC Mains Power
Before operation of the front panel begins, make sure the system check has been performed in section 2.12. After that has been done, the generator should be turned on following the procedure below；
Generator Operation through the ENI Monitor
This section details how to operate the GMW-25 Generator using the ENI Monitor.
